Robert J. Aronno, Tinsley

Location

Holiday Inn, Manatee Room B

Start Date

29-4-1997 2:00 PM

Description

The Semiconductor Industry needs Microlithography Equipment with even more Precise Optics to extend optical lithograph through shorter wavelengths to EUV at 13nm

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Apr 29th, 2:00 PM

Paper Session I-B - Spinoffs for Hubble Optics

Holiday Inn, Manatee Room B

The Semiconductor Industry needs Microlithography Equipment with even more Precise Optics to extend optical lithograph through shorter wavelengths to EUV at 13nm

 

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