Photoacoustic Study of KrF Laser Heating of Si: Implications for Laser Particle Removal

Authors

Sergey I. Kudryashov, Florida State UniversityFollow
Susan D. Allen, Florida State UniversityFollow

Document Type

Article

Publication/Presentation Date

11-15-2002

Abstract/Description

A photoacoustic study of KrF laser heating of Si has revealed that the dominant mechanism of acoustic generation is thermoacoustic with a considerable contribution from the concentration-deformation mechanism at laser fluences below the Si melting threshold of 0.5 J/cm ². Upon Si melting the contraction of the molten material contributes significantly to acoustic generation. At fluences above 1.4 J/cm ² laser ablation of the molten layer enhances the amplitude of the compression pulse and diminishes that of the rarefaction pulse. The results of photoacoustic measurements allow optimization of experimental conditions for dry laser particle removal.

© 2002 American Institute of Physics.

Publication Title

Journal of Applied Physics

DOI

https://doi.org/10.1063/1.1503859

Publisher

American Institute of Physics

Additional Information

Dr. Susan Allen was not affiliated with Embry-Riddle Aeronautical University at the time this document was published.

Required Publisher’s Statement

Kudryashov, S. I., & Allen, S. D. (2002). Photoacoustic Study of KrF Laser Heating of Si: Implications for Laser Particle Removal. Journal of Applied Physics, 92(10). https://doi.org/10.1063/1.1503859